Dwyer, K.
, Kim, H.
, Simons, D.
and Pomeroy, J.
(2017),
Temperature dependent 29Si incorporation during deposition of highly enriched 28Si films, Physical Review Materials, [online], https://doi.org/10.1103/PhysRevMaterials.1.064603, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923668
(Accessed December 9, 2024)