@article{819641,
  author = {Kevin Dwyer and Hyun Kim and David Simons and Joshua Pomeroy},
  title = {Temperature dependent 29Si incorporation during deposition of highly enriched 28Si films},
  year = {2017},
  number = {1},
  month = {2017-11-16 00:11:00},
  publisher = {Physical Review Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923668},
  doi = {https://doi.org/10.1103/PhysRevMaterials.1.064603},
  language = {en},
}