TY  - JOUR
AU  - Kevin Dwyer
AU  - Hyun Kim
AU  - David Simons
AU  - Joshua Pomeroy
C2  - Physical Review Materials
DA  - 2017-11-16 00:11:00
DO  - https://doi.org/10.1103/PhysRevMaterials.1.064603
LA  - en
M1  - 1
PB  - Physical Review Materials
PY  - 2017
TI  - Temperature dependent 29Si incorporation during deposition of highly enriched 28Si films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923668
ER  -