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Submicrometer Linewidth Metrology



Michael T. Postek, Robert D. Larrabee
Technical Note (NIST TN) - 958
Report Number


Postek, M. and Larrabee, R. (2001), Submicrometer Linewidth Metrology, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD (Accessed February 25, 2024)
Created December 31, 2000, Updated October 12, 2021