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Submicrometer Linewidth Metrology

Published

Author(s)

Michael T. Postek, Robert D. Larrabee
Citation
Technical Note (NIST TN) - 958
Report Number
958

Citation

Postek, M. and Larrabee, R. (2001), Submicrometer Linewidth Metrology, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD (Accessed February 25, 2024)
Created December 31, 2000, Updated October 12, 2021