TY  - GEN
AU  - Michael Postek
AU  - Robert Larrabee
C2  - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-01-01 00:01:00
LA  - en
PB  - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - Submicrometer Linewidth Metrology
ER  -