@misc{771846,
  author = {Michael Postek and Robert Larrabee},
  title = {Submicrometer Linewidth Metrology},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}