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Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon

Published

Author(s)

B J Belzer, D Chandler-Horowitz, D B Novotny, G A Candela, M C Croarkin
Citation
- NBS SP 260-109
Report Number
NBS SP 260-109

Citation

Belzer, B. , Chandler-Horowitz, D. , Novotny, D. , Candela, G. and Croarkin, M. (1988), Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.260-109 (Accessed April 14, 2024)
Created January 1, 1988, Updated May 19, 2023