Belzer, B.
, Chandler-Horowitz, D.
, Novotny, D.
, Candela, G.
and Croarkin, M.
(1988),
Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.260-109
(Accessed April 27, 2024)
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Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon
Published
Author(s)
, , , ,
Citation
- NBS SP 260-109
Report Number
NBS SP 260-109
Pub Type
NIST Pubs
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Citation
Created January 1, 1988, Updated May 19, 2023