TY  - GEN
AU  - B J Belzer
AU  - D Chandler-Horowitz
AU  - D B Novotny
AU  - G A Candela
AU  - M C Croarkin
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1988-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.260-109
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1988
TI  - Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon
ER  -