@misc{1163346,
  author = {B J Belzer and D Chandler-Horowitz and D B Novotny and G A Candela and M C Croarkin},
  title = {Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon},
  year = {1988},
  month = {1988-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.260-109},
  language = {en},
}