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Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon

Published

Author(s)

G. A. Candela, Deane Chandler-Horowitz, Jay F. Marchiando, Donald B. Novotny, Barbara J. Belzer, C M. Croarkin
Citation
Special Publication (NIST SP) -
Volume
260
Issue
109

Citation

Candela, G. , Chandler-Horowitz, D. , Marchiando, J. , Novotny, D. , Belzer, B. and Croarkin, C. (1988), Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 12, 2024)
Created September 30, 1988, Updated October 12, 2021