Candela, G.
, Chandler-Horowitz, D.
, Marchiando, J.
, Novotny, D.
, Belzer, B.
and Croarkin, C.
(1988),
Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed April 23, 2024)
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Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon
Published
Author(s)
G. A. Candela, , , Donald B. Novotny, ,
Citation
Special Publication (NIST SP) -
Volume
260
Issue
109
NIST Pub Series
Pub Type
NIST Pubs
Citation
Created September 30, 1988, Updated October 12, 2021