@misc{767516,
  author = {G. Candela and Deane Chandler-Horowitz and Jay Marchiando and Donald Novotny and Barbara Belzer and C Croarkin},
  title = {Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon},
  year = {1988},
  number = {260},
  month = {1988-10-01 00:10:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}