TY - GEN AU - G. Candela AU - Deane Chandler-Horowitz AU - Jay Marchiando AU - Donald Novotny AU - Barbara Belzer AU - C Croarkin C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1988-10-01 00:10:00 LA - en M1 - 260 PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1988 TI - Standard Reference Materials: Preparation and Certificaiton of SRM-2530, Ellipsometric Parameters and Derived Thickness and Refractive Index of a Silicon Dioxide Layer on Silicon ER -