Martinez, J.
, Obeng, Y.
and Buckley, M.
(2010),
Semiconductor Microelectronics and Nanoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed December 10, 2024)
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Semiconductor Microelectronics and Nanoelectronics Programs
Published
Author(s)
, ,
Abstract
The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling repaid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST), in fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.Citation
NIST Interagency/Internal Report (NISTIR) - 7686
Report Number
7686
NIST Pub Series
Pub Type
NIST Pubs
Keywords
critical dimension, linewidth, microelectronics, nanoelectronics, semiconductor, wafer
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created July 1, 2010, Updated March 25, 2020