@misc{253811,
  author = {Joaquin Martinez and Yaw Obeng and Michele Buckley},
  title = {Semiconductor Microelectronics and Nanoelectronics Programs},
  year = {2010},
  month = {2010-07-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}