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Search Publications by: Matthew Spidell (Fed)

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Displaying 1 - 13 of 13

NIST efforts in extreme-ultraviolet metrology

November 21, 2023
Author(s)
Charles S. Tarrio, Steven Grantham, Rob Vest, Thomas A. Germer, Bryan Barnes, Stephanie Moffitt, Brian Simonds, Matthew Spidell
For several decades, the National Institute of Standards and Technology (NIST) has actively supported metrology programs for extreme ultraviolet (EUV) lithography. We will describe our existing programs in optics lifetime, reflectometry, and radiometry

High-accuracy room temperature planar absolute radiometer based on vertically aligned carbon nanotubes

July 1, 2021
Author(s)
Anna Vaskuri, Michelle Stephens, Nathan Tomlin, Matthew Spidell, Chris Yung, Andrew Walowitz, Cameron Straatsma, David Harber, John H. Lehman
We have developed a Planar Absolute Radiometer for Room Temperature (PARRoT) that will replace the legacy C-series calorimeter as the free-space continuous-wave laser power detector standard at the National Institute of Standards and Technology (NIST)

Comparison of electrostatic and photon pressure force references at the nanonewton level

May 3, 2021
Author(s)
Gordon Shaw, John A. Kramar, Paul Williams, Matthew Spidell, Richard Mirin, Julian Stirling
This work describes a comparison between nanonewton force references derived from an electrostatic force balance and photon pressure force from calibrated laser optical power in the 1 watt range. The NIST Electrostatic Force Balance (EFB) is used to

Room temperature Laser Power Standard Using a Microfabricated, Electrical Substitution Bolometer

February 18, 2021
Author(s)

Michelle Stephens, Christopher Yung, Nathan Tomlin, Anna Vaskuri, Ivan Ryger, Matthew Spidell, Malcolm G. White, Thomas Jenkins, Jennifer Landry, Tesfatsion Sereke, John Lehman

The design and performance of a room temperature electrical substitution radiometer for use as an absolute standard for measuring continuous-wave laser power over a wide range of wavelengths, beam diameters and powers is described. The standard achieves an

Micromachined force balance for optical power measurement by radiation pressure sensing

August 6, 2018
Author(s)
Ivan Ryger, Alexandra B. Artusio-Glimpse, Paul A. Williams, Nathan A. Tomlin, Michelle S. Stephens, Matthew T. Spidell, Kyle A. Rogers, John H. Lehman
We introduce a micromachined force scale for laser power measurement by means of radiation pressure sensing. With this technique, the measured laser light is not absorbed and can be utilized while being measured. We employ silicon micromachining technology

Geometric contributions to chopper wheel optical attenuation uncertainty

December 9, 2017
Author(s)
Matthew T. Spidell, Joshua A. Hadler, Michelle S. Stephens, John H. Lehman, Paul A. Williams
Calibrated reflective optical choppers are used in NIST’s high power laser calibration services due to their advantages in performance and safety over wedges and semi-transparent materials for beam power reduction. While the design, operation, and

Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing

July 2, 2017
Author(s)
Ivan Ryger, Paul A. Williams, Nathan A. Tomlin, Alexandra B. Artusio-Glimpse, Michelle S. Stephens, Matthew T. Spidell, John H. Lehman
Measurement of high optical power using radiation pressure sensing [1] is attractive for its non-absorbing power measurment allowing compact sensor dimensions, faster response times and negligible optical power dissipation compared to standard thermal

Noise characteristics of thermistors: measurement methods and results of selected devices

February 13, 2017
Author(s)
Ivan Ryger, Michelle S. Stephens, Malcolm G. White, Nathan A. Tomlin, Matthew T. Spidell, John H. Lehman, Dave Harber
As part of the development of a spectrally-uniform room-temperature absolute radiometer, we have studied the electrical noise of several bulk chip thermistors in order to estimate the noise floor and optical dynamic range. Understanding the fundamental

Low noise thermistor read out for wideband room temperature infrared detectors

September 25, 2016
Author(s)
Ivan Ryger, Michelle S. Stephens, John H. Lehman, Matthew T. Spidell, Malcolm G. White, Nathan A. Tomlin, Dave Harber, Peter Lobotka
An absolute electrical substitution radiometer is a way to ensure highly accurate and stable measurement of optical power in a wide range of optical wavelengths. Its sensitivity is mainly determined by the temperature stability of the equithermal bath and

Portable high-accuracy non-absorbing laser power measurement at kilowatt levels by means of radiation pressure

February 16, 2016
Author(s)
Paul A. Williams, Joshua A. Hadler, Frank C. Maring, Robert Lee, Kyle A. Rogers, Brian J. Simonds, Matthew T. Spidell, Ari D. Feldman, John H. Lehman
We describe a unique optical power meter which measures the radiation pressure to accurately determine a laser’s optical power output. This approach traces its calibration of the optical Watt to the kilogram. Our power meter is designed for high-accuracy

Development of a miniature radiation pressure-measuring microscale

Author(s)
Ivan Ryger, Alexandra B. Artusio-Glimpse, Paul A. Williams, Nathan A. Tomlin, Michelle S. Stephens, Matthew T. Spidell, John H. Lehman
Traditional methods for accurate measurement of high-power lasers involve total absorption of the laser light [1]. Our method, however, measures photon pressure exerted on a mirror without obstruction of the laser beam. The technique enables in situ