Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing

Published

July 2, 2017

Author(s)

Ivan Ryger, Paul A. Williams, Nathan A. Tomlin, Alexandra B. Artusio-Glimpse, Michelle S. Stephens, Matthew T. Spidell, John H. Lehman

Abstract

Measurement of high optical power using radiation pressure sensing [1] is attractive for its non-absorbing power measurment allowing compact sensor dimensions, faster response times and negligible optical power dissipation compared to standard thermal power meters. In this contribution we focus on development of a micromechanical force scale for reduced size and response time. The sensor itself consists of Bragg mirror integrated with a silicon spring. Its photon pressure-dependent deflection is captured by capacitive bridge electronics [2]. The system non-linearities can be suppressed using electrical substitution [3]. Opto-electronical characterization of the spring and capacitive bridge response to the spring deflection is demonstrated.

Proceedings Title

Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in
Optical Radiometry

Conference Dates

June 13-16, 2017

Conference Location

Tokyo

Conference Title

NEWRAD 2017, 13th International Conference on New Developments and Applications in
Optical Radiometry

Pub Type

Conferences

Keywords

Radiation pressure, Force scale, Silicon micromachining, distributed Bragg mirror, Capacitive bridge

Citation

Ryger, I. , Williams, P. , Tomlin, N. , Artusio-Glimpse, A. , Stephens, M. , Spidell, M. and Lehman, J. (2017), Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing, Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 (Accessed October 24, 2025)