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Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing

Published

Author(s)

Ivan Ryger, Paul A. Williams, Nathan A. Tomlin, Alexandra B. Artusio-Glimpse, Michelle S. Stephens, Matthew T. Spidell, John H. Lehman

Abstract

Measurement of high optical power using radiation pressure sensing [1] is attractive for its non-absorbing power measurment allowing compact sensor dimensions, faster response times and negligible optical power dissipation compared to standard thermal power meters. In this contribution we focus on development of a micromechanical force scale for reduced size and response time. The sensor itself consists of Bragg mirror integrated with a silicon spring. Its photon pressure-dependent deflection is captured by capacitive bridge electronics [2]. The system non-linearities can be suppressed using electrical substitution [3]. Opto-electronical characterization of the spring and capacitive bridge response to the spring deflection is demonstrated.
Proceedings Title
Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in
Optical Radiometry
Conference Dates
June 13-16, 2017
Conference Location
Tokyo
Conference Title
NEWRAD 2017, 13th International Conference on New Developments and Applications in
Optical Radiometry

Keywords

Radiation pressure, Force scale, Silicon micromachining, distributed Bragg mirror, Capacitive bridge

Citation

Ryger, I. , Williams, P. , Tomlin, N. , Artusio-Glimpse, A. , Stephens, M. , Spidell, M. and Lehman, J. (2017), Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing, Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 (Accessed June 20, 2024)

Issues

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Created July 1, 2017, Updated July 2, 2020