TY - CONF AU - Ivan Ryger AU - Paul Williams AU - Nathan Tomlin AU - Alexandra Artusio-Glimpse AU - Michelle Stephens AU - Matthew Spidell AU - John Lehman C2 - Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 DA - 2017-07-02 LA - en PB - Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 PY - 2017 TI - Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing ER -