February 26, 2013
Author(s)
Peter J. Lowell, Galen C. O'Neil, Jason M. Underwood, Joel N. Ullom
Nano- and Micro- Electromechanical devices (NEMS & MEMS) have become ubiquitous; examples include automobile accelerometers, inkjet printer heads, infrared viewers, and mirrors for image manipulation and projection. Applications fall broadly in the