July 1, 2000
Author(s)
Kristine A. Bertness, J T. Armstrong, Ryna B. Marinenko, Larry Robins, Albert J. Paul, Joseph G. Pellegrino, Paul M. Amirtharaj, Deane Chandler-Horowitz
We measure the composition of AlGaAs layers during epitaxial crystal growth using in situ normal-incidence optical reflectance supported by independent methods of measuring growth rate. The results are compared with conventional ex situ characterization.