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Search Publications by: Kristen L Steffens (Fed)

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Displaying 26 - 31 of 31

Investigation and Control of Spatial Characteristics of Chamber-Cleaning Plasmas

February 1, 2001
Author(s)
Kristen L. Steffens, Mark A. Sobolewski
Planar laser-induced fluorescence (PLIF) measurements were made to determine 2-D spatial maps of CF2 density as a chemical marker of plasma uniformity in 9%O2/91%CF4 chamber-cleaning plasmas. Measurements were made in the capacitively-coupled Gaseous

Electrical Control of the Spatial Uniformity of Reactive Species in Plasmas

December 1, 1999
Author(s)
Mark A. Sobolewski, Kristen L. Steffens
We report a new method for controlling the spatial distribution of reactive chemical species in a parallel-plate reactor, by means of a variable-impedance load placed between the unpowered electrode and ground. The technique was demonstrated in 89% CF(sub4