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Displaying 26 - 50 of 66

Collaborating on the Design and Manufacture of an Atomic Artifact Transport System: A Case Study in VRML as a Visualization Tool for Consensus Building

September 1, 1998
Author(s)
Robert Allen, Srinivas Nidamarthi, P V. Rao, Richard L. Rhorer, Ram D. Sriram, E C. Teague
We report on our experience using the Virtual Reality Markup Language (VRML) to collaborate on the design and manufacture of an artifact transport system (ATS). Specifically designed for the purpose of transporting nanometer-scale dimensional artifacts at

Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line

June 1, 1998
Author(s)
Richard M. Silver, Carsten P. Jensen, V W. Tsai, Joseph Fu, John S. Villarrubia, E C. Teague
We are developing the instrumentation and prototype samples at NIST to enable the counting of atom-spacings across linewidth features etched in silicon. This is an effort to allow the accurate counting of atom-spacings across a feature in a controlled

Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab

March 1, 1998
Author(s)
H Amick, B Sennewald, E C. Teague, Brian R. Scace
This paper reports the results of the finite element analysis and in-situ testing of a large-scale (4 m x 10 m) pneumatically isolated concrete slab are reported. The slab was constructed as a design prototype for next generation metrology laboratories at

The Molecular Measuring Machine

January 1, 1998
Author(s)
John A. Kramar, E Gilsinn, E Amatucci, C Villarrubia, E C. Teague, W Scire, William B. Penzes
To help meet the measurement needs of industries preparing to manufacture future generations of nanoelectronic devices and circuits, the National Institute of Standards and Technology (NIST) has designed and built an instrument¿called the Molecular

Vibration of a Room-Sized Airspring-Supported Slab

January 1, 1998
Author(s)
H Amick, B Sennewald, N C. Pardue, E C. Teague, Brian R. Scace
This paper reports the results of the finite element analysis and in situ testing of a large-scale (4 m x 10 m) pneumatically isolated concrete slab. The slab was constructed as a design prototype for next-generation metrology laboratories at the National

1/N Feynman Machines as a Path to Ultraminiaturization

September 1, 1995
Author(s)
E C. Teague
The possibility of implementing Feynman''s proposal for achieving ultraminiaturization by an iterative process of three-dimensional machines making ever-smaller three-dimensional machines is considered in the nature of a thought experiment. A large array

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

May 1, 1994
Author(s)
Michael W. Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E C. Teague
This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature placement by a primary pattern generator. A new test structure has now been developed from the