December 15, 2014
Author(s)
Prem K. Rachakonda, Daniel S. Sawyer, Balasubramanian Muralikrishnan, Christopher J. Blackburn, Craig M. Shakarji, Gregory F. Strouse, Steven D. Phillips
The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has developed a new in-situ temperature calibration system. This paper discusses the system components, an in-situ calibration procedure, the uncertainty