Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip

Published

January 5, 2012

Author(s)

Balasubramanian Muralikrishnan, Jack A. Stone Jr., Craig M. Shakarji, John R. Stoup

Abstract

The tip of a traditional CMM probe used for measurements of macro-scale artifacts is generally a sphere of excellent geometry. Its known diameter (from a prior calibration) and form along with the known approach direction (which is normal to the surface) facilitates probe radius compensation in a straightforward manner. Neither of these conditions is valid for micro-scale measurements made with a flexible fiber probe on a CMM. This presents two challenges. The first involves the calibration of the probe’s true size and shape. The second involves developing a method for compensating probe radius and form on measurement data from test artifacts. We describe these issues here in the context of an application involving three-dimensional measurements on micro-scale features (a conical section of 20 half angle and a rounded tip of 38 m radius) performed with the NIST fiber probe.

Citation

Measurement Science & Technology

Pub Type

Journals

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Keywords

Coordinate metrology, Ellipsoid fit, Fiber probe

Citation

Muralikrishnan, B. , Stone, J. , Shakarji, C. and Stoup, J. (2012), Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip, Measurement Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909420 (Accessed October 27, 2025)