TY  - JOUR
AU  - Balasubramanian Muralikrishnan
AU  - Jack Stone
AU  - Craig Shakarji
AU  - John Stoup
C2  - Measurement Science & Technology
DA  - 2012-01-05
LA  - en
PB  - Measurement Science & Technology
PY  - 2012
TI  - Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909420
ER  -