@article{18046, author = {Balasubramanian Muralikrishnan and Jack Stone and Craig Shakarji and John Stoup}, title = {Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip}, year = {2012}, month = {2012-01-05}, publisher = {Measurement Science & Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909420}, language = {en}, }