September 1, 1993
Author(s)
Jabez J. McClelland, John Unguris, R E. Scholten, Daniel T. Pierce
A simple, compact Cr evaporator is constructed by electroplating Cr metal onto the tip of a W hairpin filament. At 5 cm from the evaporator, deposition rates up to 10 nm min -1 (flux {asymp} 10 19 atoms m -2s -1) have been obtained, with total deposition