May 18, 2010
      
                  
        
  Author(s)
  Michael S. Gaither,   Frank W. DelRio,   Richard S. Gates,   Edwin R. Fuller,   Robert F. Cook
 
       
            
    
    
        A new test specimen has been developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results