July 1, 2006
Author(s)
Christopher Stafford, C Harrison, D Julthongpiput, B D. Vogt
The elastic moduli of ultrathin poly(styrene) and poly(methylmethacrylate) films of thickness ranging from 200 nm to 5 nm were investigated using a buckling-based metrology. Below 40 nm, the apparent modulus of the PS and PMMA films decreases dramatically