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Displaying 1451 - 1475 of 1931

Atomic Hydrogen for the Formation of Abrupt Sb Doping Profiles in MBE-Grown Si

May 1, 1998
Author(s)
P E. Thompson, C Silvestre, M E. Twigg, G Jernigan, David S. Simons
Previously atomic hydrogen has been shown to be effective in reducing the segregation of Ge on Si[100] during solid source molecular beam epitaxygrowth. In this work we have investigated atomic hydrogen to determine if it is equally effective in reducing

Kinetically-Controlled Chemical Sensing Using Micromachined Structures

May 1, 1998
Author(s)
Stephen Semancik, Richard E. Cavicchi
Microdevices produced by machining silicon can offer a variety of control functionality on a miniature scale, 1.2 with general advantages connected to not only reduced size (less invasive), but also lower power requirements, lower cost, and reproducibility
Displaying 1451 - 1475 of 1931
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