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Displaying 951 - 975 of 1414

Electron Collision Data for Plasma-Processing Gases

October 1, 2000
Author(s)
Loucas G. Christophorou, James K. Olthoff
Low-temperature plasma applications require detailed understanding of the physical and chemical processes occurring in the plasmas themselves. For instance, as the push for smaller feature sizes and higher quality devices in the semiconductor industry has

Electron Interactions with Excited Atoms and Molecules

October 1, 2000
Author(s)
Loucas G. Christophorou, James K. Olthoff
Elastic, inelastic, and superelastic scattering of electrons by and electron-impact ionization of excited atoms are reviewed and discussed and the role of the electric dipole polarizabilty in the interaction of slow electrons with excited atoms is

Inductively Coupled Plasmas in Low Global Warming Potential Gases

August 1, 2000
Author(s)
Amanda N. Goyettes, Yicheng Wang, James K. Olthoff
Many high density discharges used in microelectronics fabrication use fluorocarbon gases with coincidentally high global-warming potentials (GWPs). We have determined the identities, fluxes, and energy distributions of ions produced in high density

Automated Parameter Extraction Software for Advanced IGBT Modeling

July 10, 2000
Author(s)
Allen R. Hefner Jr., Sebastien Bouche
A software package for extracting parameters used in advanced IGBT models is presented. In addition, new model equations and extraction procedures are introduced that more accurately describe a wide range of IGBT types including the recently developed Warp

Multiport Noise Characterization and Differential Amplifiers

June 1, 2000
Author(s)
James P. Randa
I address the issue of the definition and measurement of noise figure and parameters to characterize multiport devices, particularly differential amplifiers. A parameterization in terms of the noise matrix appears to be the most practical. The noise figure

4 Amp 4H-SiC JBD Diodes

May 1, 2000
Author(s)
Ranbir Singh, Sei-Hyung Ryu, M. Palmer, Allen R. Hefner Jr., Jih-Sheng Lai
Displaying 951 - 975 of 1414
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