October 12, 2021
Author(s)
S Aggarwal, S R. Perusse, C J. Kerr, R Ramesh, D B. Romero, J T. Evans, L Boyer, J Velasquez
We report on the recovery of fully integrated Pb(Nb,Zr,Ti)O 3 ferroelectric capacitors damaged during forming gas (4% H 2, balance N 2) annealing. In such capacitors oxygen loss, lead loss and hydrogen incorporation are three degradation mechanisms that