October 23, 2013
Author(s)
Nathan D. Orloff, C H. Lee, T Birol, J A. Mundy, V. Goian, R. Haislmaier, E. Vlahos, Y. Kim, J. D. Brock, Y Zhu, R. Uecker, V. Gopalan, S. Kamba, X X. Xi, D A. Muller, I. Takeuchi, James C. Booth, C. J. Fennie
The miniaturization and integration of frequency-agile microwave circuitstunable filters, resonators, phase shifters and morewith microelectronics offers tantalizing device possibilities, yet requires thin films whose dielectric constant at GHz