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Displaying 42426 - 42450 of 74189

Permittivity Characterization of Low-k Thin films from Transmission-Line Measurements

January 1, 2003
Author(s)
Michael D. Janezic, Dylan Williams, V. Blaschke, A. Karamcheti, Fengbo Hang
We develop a broadband technique for measuring the permittivity of low-k thin films using microstrip transmission-line measurements. From measurements of the complex microstrip propagation constant and the characteristics impedance, we determine the

PHASE DOPPLER MEASUREMENTS OF LIQUID AGENT TRANSPORT OVER A HEATED CYLINDER

January 1, 2003
Author(s)
Cary Presser, Charles T. Avedisian, B S. Johnson
Experimental results are presented for a well-characterized, droplet-laden homogenous turbulent flow field around a cylindrical obstacle. Liquid agent transport was investigated around an unheated and heated cylinder under ambient conditions. Results for

Photomask Dimensional Metrology in the SEM Part I: Has Anything Really Changed?

January 1, 2003
Author(s)
Michael T. Postek, Andras Vladar, Marylyn H. Bennett
Photomask dimensional metrology in the scanning electron microscope (SEM) has not evolved as rapidly as the metrology of resists and integrated circuit features on wafers. This has been due partly to the 4x (or 5x) reduction in the optical steppers and

Potential Benefits of Smart Refrigerant Distributors

January 1, 2003
Author(s)
William V. Payne, Piotr A. Domanski
The main goal of this study was to investigate the benefits possible for finned tube refrigerant evaporators when refrigerant distribution was precisely controlled to produce a desired equal superheat in each circuit. This goal was accomplished by
Displaying 42426 - 42450 of 74189
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