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Displaying 42301 - 42325 of 74067

Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts

January 1, 2003
Author(s)
Bradley N. Damazo, M A. Donmez, Michael L. McGlauflin, J B. Werkmeister, Johannes A. Soons, S C. Bryant, Alex Slocum
With the increased prevalence of meso-scaled products and feature sizes, new tools are needed to bridge the gap between fabrication processes tailored for micrometer and millimeter sized features [1-4]. Compared to its traditional counterpart, a small

Permittivity Characterization of Low-k Thin films from Transmission-Line Measurements

January 1, 2003
Author(s)
Michael D. Janezic, Dylan Williams, V. Blaschke, A. Karamcheti, Fengbo Hang
We develop a broadband technique for measuring the permittivity of low-k thin films using microstrip transmission-line measurements. From measurements of the complex microstrip propagation constant and the characteristics impedance, we determine the

PHASE DOPPLER MEASUREMENTS OF LIQUID AGENT TRANSPORT OVER A HEATED CYLINDER

January 1, 2003
Author(s)
Cary Presser, Charles T. Avedisian, B S. Johnson
Experimental results are presented for a well-characterized, droplet-laden homogenous turbulent flow field around a cylindrical obstacle. Liquid agent transport was investigated around an unheated and heated cylinder under ambient conditions. Results for

Photomask Dimensional Metrology in the SEM Part I: Has Anything Really Changed?

January 1, 2003
Author(s)
Michael T. Postek, Andras Vladar, Marylyn H. Bennett
Photomask dimensional metrology in the scanning electron microscope (SEM) has not evolved as rapidly as the metrology of resists and integrated circuit features on wafers. This has been due partly to the 4x (or 5x) reduction in the optical steppers and
Displaying 42301 - 42325 of 74067
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