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Displaying 31351 - 31375 of 73697

Line Width Measurement Technique Using Through-Focus Optical Images

January 1, 2008
Author(s)
Ravikiran Attota, Richard M. Silver, Ronald G. Dixson
We present a detailed experimental study of a new through-focus technique to measure line width (CD) with nanometer sensitivity using a bright field optical microscope. This method relies on analyzing intensity gradients in optical images at different

Metrologies for Mechanical Response of Micro- and Nanoscale Systems

January 1, 2008
Author(s)
Robert Keller, Donna C. Hurley, David T. Read, Paul Rice
This chapter describes metrologies developed by NIST scientists and collaborators for mechanical properties of dimensionally-constrained materials; these approaches make use of methods inherently sensitive to small volumes. Attention is focused on

MODELING AND MEASURING THE ECONOMIC ROLES OF TECHNOLOGY INFRASTRUCTURE

January 1, 2008
Author(s)
Gregory C. Tassey
Designing and managing an economy’s technology infrastructure requires both accurate economic models and data to drive them. Previous models treat technology as a homogeneous entity, thereby precluding assessing investment barriers affecting infrastructure

Neutron Self-Shielding Factors for Simple Geometries, Revisited

January 1, 2008
Author(s)
Richard M. Lindstrom, Ronald F. Fleming
To assure quality measurements, the algorithms used in data analysis need to be demonstrably correct. In practice, however, some less transparent or more complicated algorithms may be difficult to trace back to their original derivation. We point out that
Displaying 31351 - 31375 of 73697
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