November 18, 1999
Author(s)
Richard E. Cavicchi, Stephen Semancik, R M. Walton, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
… In this work, micromachining and planar processing has been … device platform is a microhotplate, consisting of a built-in heater, thermometer, and electrodes to probe the sensing … and signal amplification. Millisecond temperature changes in the range of 20 degrees C to over 500 degrees C are …