July 1, 2006
Author(s)
John G. Gillen, Albert J. Fahey, M Wagner, Christine M. Mahoney
… analyzed by dynamic SIMS using SF 5 + polyatomic primary ion bombardment. Each of these systems exhibited minimal … through the depth of the film. By combing secondary ion imaging with depth profiling, 3-dimensional molecular … sections are cut in the samples with the SF5+ primary ion beam to produce a laterally magnified cross section of …