May 1, 2002
Author(s)
Mark A. Sobolewski, Yicheng Wang, A N. Goyette
… Models of ion dynamics in radio-frequency (rf) biased, high-density plasma sheaths are needed to predict ion bombardment energies in plasma simulations. To test these models, we have measured ion energy distributions (IEDs) in pure CF 4 discharges at … CF4, high-density plasma, inductively coupled discharge, ion energy distribution, plasma processing, radio-frequency …