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Displaying 3026 - 3050 of 4637

A Monte Carlo Model for SEM Linewidth Metrology

May 1, 1994
Author(s)
J R. Lowney, Michael T. Postek, Andras Vladar
… applied to the analysis of electron transmission through a gold line on a thin silicon substrate, such as used in an …
Displaying 3026 - 3050 of 4637
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