September 10, 2007
Author(s)
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
… Helium Ion Microscopy (HIM) is a new, potentially disruptive … the helium ions, it is theoretically possible to focus the ion beam into a smaller probe size relative to that of an … voltage and materials involved. Conversely, the helium ion beam interacts with the sample, but it does not have as …