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Displaying 1801 - 1825 of 1910

MEMS Young's Modulus and Step Height Measurements with Round Robin Results

September 30, 2010
Author(s)
Janet M. Cassard, Richard A. Allen, Craig D. McGray, Jon C. Geist
This paper presents the results of a microelectromechanical systems (MEMS) Young s modulus and step height round robin experiment, completed in April 2009, which compares Young s modulus and step height measurement results at a number of laboratories. The

Characterization of SiGe Films for use as a National Institute of Standards and Technology (NIST) Microanalysis Reference material (RM 8905)

February 1, 2010
Author(s)
Ryna B. Marinenko, Shirley Turner, David S. Simons, Savelas A. Rabb, Rolf L. Zeisler, Lee L. Yu, Dale E. Newbury, Rick L. Paul, Nicholas W. Ritchie, Stefan D. Leigh, Michael R. Winchester, Lee J. Richter, Douglas C. Meier, Keana C. Scott, D Klinedinst, John A. Small
… Ge composition in the Si0.86Ge0.14 alloy. The results are 30.228 % mass fraction Ge with an expanded uncertainty of the …
Displaying 1801 - 1825 of 1910
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