January 1, 1998
Author(s)
Kristen L. Steffens, Mark A. Sobolewski
Planar laser-induced fluorescence (PLIF) measurements were made to determine 2-D spatial maps of CF 2 density as an indicatior of chemical uniformity in 92% CF 4square root of O 2 and 50% C 2F 6 square root of O 2 chamber cleaning plasmas. Measurements