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Mass Spectrometric Measurement of Molecular Dissociation in Inductively-coupled Plasmas

Published

Author(s)

Yicheng Wang, Richard J. Van Brunt, James K. Olthoff
Citation
Journal of Applied Physics
Volume
83
Issue
2

Citation

Wang, Y. , Van Brunt, R. and Olthoff, J. (1998), Mass Spectrometric Measurement of Molecular Dissociation in Inductively-coupled Plasmas, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14879 (Accessed April 12, 2024)
Created December 31, 1997, Updated October 12, 2021