@article{778601,
  author = {Yicheng Wang and Richard Van Brunt and James Olthoff},
  title = {Mass Spectrometric Measurement of Molecular Dissociation in Inductively-coupled Plasmas},
  year = {1998},
  number = {83},
  month = {1998-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14879},
  language = {en},
}