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Electronics

Sensors

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Displaying 451 - 475 of 1388

Microhotplate Platforms for Chemical Sensor Research

June 1, 2001
Author(s)
Stephen Semancik, Richard E. Cavicchi, M C. Wheeler, J E. Tiffany, G Poirier, R M. Walton, John S. Suehle, B. Panchapakesan, D. E. DeVoe
This paper describes the development and use of microdevices and microarrays in chemical sensor research. The surface-micromachined microhotplate structure common within the various platforms included here was originally designed for fabricating

Jim Zimmerman and the SQUID

March 1, 2001
Author(s)
Richard L. Kautz
The career of Jim Zimmerman, beginning with a solid foundation in electronics and cryogenics, reached a turning point in 1965 when he became coinventor of the rf SQUID (Superconducting Quantum Interference Device), while working at the Scientific

First Steps Towards Small Arrays of Mo/Au Microcalorimeters

December 1, 2000
Author(s)
J. Olsen, E. C. Kirk, K. Thomsen, B. van den Brandt, Ph. Lerch, L. Scandella, A. Zehnder, S. Mango, H. R. Ott, Martin Huber, Gene C. Hilton, John M. Martinis
We are developing small arrays of microcalorimeters based on transition edge sensors made with Mo/Au bilayers deposited on silicon nitride membranes and Au absorbers. The superconducting transition of the bilayers is adjusted to be around 130 mK with a

Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis

November 1, 2000
Author(s)
David A. Wollman, John M. Martinis, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, Martin Huber, Dale Newbury
Improved x-ray detector technology continues to be a critical metrological need in the semiconductor industry for contaminant particle analysis 1,2 and for high-spatial-resolution x-ray microanalysis using low-beam-voltage field-emission scanning electron

SQUIDs Past, Present, and Future: A Sympsium in Honor of Jim Zimmerman

October 1, 2000
Author(s)
Richard L. Kautz
The symposium on SQUIDs Past, Present, and Future was held at the National Institute of Standards and Technology in Boulder, Colorado on November 15, 1997 to celebrate the career of James E. Zimmerman. As a member of a team at the Ford Scientific

Comparison of Elemental Detection Using Microcalorimetry, SIMS, AES and EDS (SEM, STEM, and TEM)

August 1, 2000
Author(s)
C. B. Vartuli, F. A. Stevie, David A. Wollman, M. Antonell, R. B. Irwin, J. M. McKinley, T L. Shofner, B. M. Purcell, S. A. Anderson, Bobby To
Cu contamination has become a larger concern as more semiconductor fabrication facilities switch from aluminum to Cu interconnects. The resolution limits of several analytical tools are compared to determine the optimum analysis methods for detecting Cu
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