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We present a simple and straightforward approximate approach to removing resonant artifacts that arise in the material parameters extracted near half-wavelength resonances that arise from transmission/reflection (T/R) measurements on low-loss materials. In
A scatterfield microscope for deep sub-wavelength semiconductor metrology using 193 nm light has been designed. In addition to accommodating the fixed numerical aperture and size of its commercial catadioptric objective lens, the illumination optics are
Hui H. Yuan, Guangjun Cheng, Lin You, Haitao Li, Hao Zhu, Wei Li, Joseph J. Kopanski, Yaw S. Obeng, Angela R. Hight Walker, David J. Gundlach, Curt A. Richter, D. E. Ioannou, Qiliang Li
In this work, we present a study of enhancing MoS2 transistor performance by using proper metal contact. We found that the on-state current of MoS2 field-effect transistors with 30 nm Au/ 30 nm Ag contacts is enhanced more than 60 times and the
Guangfan Jiao, Jiwu Lu, Jason Campbell, Jason Ryan, Kin P. Cheung, Chadwin D. Young, Gennadi Bersuker
This work utilizes device-level eye-diagram measurements to examine NBTI-induced changes in timing jitter at circuit speeds. The measured jitter is examined for a variety of ring-oscillator and pseudo-random gate patterns. The ring-oscillator patterns were
Hui H. Yuan, Kai Zhang, Haitao Li, Hao Zhu, John E. Bonevich, Helmut Baumgart, Curt A. Richter, Qiliang Li
Metal-Oxide-Semiconductor capacitors with Bi2Te3 thin film sandwiched and embedded inside the oxide layer have been fabricated and studied. The capacitors exhibit ferroelectric-like hysteresis which is a result of the robust, reversible polarization of
Jiwu Lu, Canute I. Vaz, Guangfan Jiao, Jason P. Campbell, Jason T. Ryan, Kin P. Cheung, Gennadi Bersuker, Chadwin D. Young
Accurate reliability predictions of real world digital logic circuits rely heavily on the relevancy of device level testing. In the case of bias temperature instability (BTI), where recovery plays a significant role, a leap of faith is taken to translate
V. Goian, S. Kamba, D Nuzhnyy, Nathan Orloff, T. Birol, C.-H Lee, D. G. Schlom, James Booth
Recently, Lee et al. [1] used1% tensile strain to induce a ferroelectic instability in thin films of Srdn+1uTi nuO 3n+1u (n=1-6) phases. They showed that the Curie temperature T cu gradually increased with n, reaching 180 K for Sr7Ti6O19 (n=6). The
Lin You, Chukwudi A. Okoro, Jungjoon Ahn, Joseph Kopanski, Yaw S. Obeng, Rhonda R. Franklin
In this paper, we discuss the use of broadband high frequency electromagnetic waves (RF) to non- destructively identify, classify and characterize performance-limiting defects in emerging nanoelectronic devices. As an illustration, the impact of thermal
Kin P. Cheung, Jiwu Lu, Guangfan Jiao, Jason P. Campbell, Jason T. Ryan
Bias temperature instability (BTI) is known to be a serious reliability issue for state-of-the-art Silicon MOSFET technology [1-6]. It is well-known that in addition to a permanent degradation, there is a large recoverable degradation component [7] that
Donald Windover, David Gil, Yasushi Azuma, Toshiyuki Fujimoto
We test the reproducibility of X-ray reflectometry(XRR) measurements and optimizations using an National Metrology Institute of Japan (NMIJ)/National Institute of Advanced Industrial Science and Technology (AIST) pre-standard. Based on bootstrap analysis
Fan Zhang, Andrew Allen, Lyle E. Levine, Mark D. Vaudin, Drago Skrtic, Joseph M. Antonucci, Kathleen Hoffman, Anthony A. Giuseppetti, Jan Ilavsky
Amorphous calcium phosphate (ACP) based composites are promising restorative dental materials attributable to ACP's capacity to release calcium and phosphate ions through a complex reaction in which ACP is converted to its crystalline, apatitic form
Edwin J. Heilweil, Jin Zuanming, Dominik Gehrig, Clare Dyer-Smith, Frederic Laquai, Mischa Bonn, Dmitry Turchinovich
Ultrafast photo-induced carrier dynamics in prototypical low band-gap polymer:fullerene photovoltaic blend films PTB7:PC70BM and P3HT:PC70BM is investigated using ultrafast terahertz (THz) spectroscopy. The sub-picosecond (ps) and few-ps decays of THz
Radio frequency (RF), high frequency (HF), and analog/mixed-signal (AMS) technologies serve the rapidly growing communications markets that include many of the physical components for the Internet of Everything (IoE) (e.g., http://www.cisco.com/web/about
Tam H. Duong, Allen R. Hefner Jr., Jose M. Ortiz, Sei-Hyung Ryu , Edward VanBrunt, Lin Cheng, Scott Allen, John W. Palmour
The purpose of this paper is to present a physics-based electro-thermal Saber model and parameter extraction sequence for high-voltage SiC buffer layer n-channel insulated gate bipolar transistors (IGBTs). This model was developed by modifying and
Matthew D. Brubaker, Shannon M. Duff, Todd E. Harvey, Paul T. Blanchard, Alexana Roshko, Aric W. Sanders, Norman A. Sanford
This study presents a technique for obtaining Ga- and N-polar Gallium Nitride nanowire (GaN NW) arrays on non-polar Si (111) substrates by use of polarity-controlled AlN/GaN buffer layers. AlN films are demonstrated to adopt Al-/N-polarity for N-/Al-rich
Kevin J. Dwyer, Joshua M. Pomeroy, David S. Simons, June W. Lau, Kristen L. Steffens
Using a laboratory-scale apparatus, we enrich 28Si and produce material with 40 times less residual 29Si than previously reported. Starting from natural abundance silane gas, we offer an alternative to industrial gas centrifuges for providing materials
Dylan F. Williams, Franz-Josef Schmuckle, Ralf Doerner, Phung N. Gia, Uwe Arz, Wolfgang Heinrich
We study crosstalk and crosstalk corrections in coplanar waveguide vector-network-analyzer calibrations. We show that while crosstalk corrections can improve measurement accuracy, the effectiveness of the corrections depends on a number of factors
Steven E. Grantham, Mike Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Mueller Ulrich, Shayna khatri, Adam Magruder, Charles S. Tarrio
Laser-produced plasma (LPP) sources for extreme ultraviolet lithography (EUVL) systems utilize CO2 lasers operating with wavelength 10.6μm. Since multilayer-coated optics have high reflectivity for this infrared radiation (IR), a significant and
Charles S. Tarrio, Steven E. Grantham, Thomas A. Germer, Jack C. Rife, Thomas B. Lucatorto, Mike Kriese, Yuriy Platonov, Licai Jiang, Jim Rodriguez
The NIST Extreme Ultraviolet (EUV) Reflectometry Facility was designed in the 1990s to accommodate the largest multilayer optics envisioned at that time. However, with increasing power requirements for an EUV scanner, source collection optics have grown
Silvia H. De Paoli Lacerda, Lukas Diduch, Tseday Tegegn, Martina Orecna, Michael Strader, Elena Karnaukhova, John Bonevich, Abdu Alayash, Karel Holada, Jan Simak
Carbon nanotubes (CNT) are one of the most promising nanomaterials for use in medicine. Applications of CNT in drug/gene delivery, diagnostics and tissue engineering, among other applications, require contact of CNT with blood. Therefore, evaluation of
Liang Qiao, Wei Li, Haiyan xiao, Harry M. Meyer, Xuelei Liang, Nhan Van Nguyen, Michael D. Biegalski
The electronic properties of solid-solid interfaces play critical roles in a variety of technological applications. Recent advance of film epitaxy and characterization techniques have demonstrated a wealthy of exotic phenomena at interfaces of oxide
Y.-Y. Liu, Karl Petersson, J. Stehlik, Jacob Taylor, Jason Petta
We study a voltage biased InAs double quantum dot (DQD) that is coupled to a superconducting transmission line resonator. Inelastic tunneling in the DQD is mediated by electron phonon coupling and coupling to the cavity mode. We show that electronic
Haitao Li, Hui H. Yuan, Hao Zhu, Lin You, Joseph Kopanski, Erhai Zhao, Qiliang Li
SnTe is a conventional thermoelectric material and has been newly found to be a topological crystalline insulator. In this work, back-gate SnTe field-effect transistors have been fabricated and fully characterized. The devices exhibit n-type transistor