Kopanski, J.
, Marchiando, J.
, Lowney, J.
and Seiler, D.
(1994),
Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed December 9, 2024)
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Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon
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Created November 30, 1994, Updated October 12, 2021