@misc{794201,
  author = {Joseph Kopanski and Jay Marchiando and J Lowney and David Seiler},
  title = {Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon},
  year = {1994},
  month = {1994-12-01 00:12:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}