TY  - GEN
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Lowney, J
AU  - Seiler, David
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-12-01 00:12:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Scanning Capacitance Microscopy for Profiling PN-Junctions in Silicon
ER  -