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Reliability of Low Temperature Grown Multi-Wall Carbon Nanotube Bundles Integrated as Vias in Monolithic Three-Dimensional Integrated Circuits



Ann C. Chiaramonti Debay, Sten Vollebregt, Aric W. Sanders, Alexandra E. Curtin, R. Ishihara, David T. Read


In this extended abstract we present our recent results on the reliability testing of multi-wall carbon nanotube vertical interconnects (vias).
Microscopy and Microanalysis


carbon nanotube, electrical testing, IV curves, reliability, via
Created August 26, 2014, Updated February 19, 2017